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DauntlessLotus

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RWTH Aachen University

2023

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microfluidics biomems hydrodynamic particle sorting

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V05 V05 5.1 Hydrodynamic Particle Sorting 5.2 Valves Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 1 Contents V05 2 Contents 5.1 Hydrodynamic Particle Sorting 5.1.1 Con...

V05 V05 5.1 Hydrodynamic Particle Sorting 5.2 Valves Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 1 Contents V05 2 Contents 5.1 Hydrodynamic Particle Sorting 5.1.1 Constriction 5.1.2 Straight Channel 5.1.3 Curved Channel 5.1.4 Obstacles 5.2 Valves 5.2.1 Passive Valves 5.2.2 Active Valves  Check  Pneumatic  Multi-layer Soft-Lithography  Electrostatic  Thermopneumatic  Magnetic Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Learning Targets V5 V05 Learning Targets V5  To explain four versions of particle sorting mechanism in microchannels (constrictions, straight and curved channels, obstacles) and under which conditions they work  Passive and active valves  To know the different principles  Advantages and disadvantages  Multi-Layer Soft-Lithography  How it works Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 3 V05 5.1.1 Hydrodynamic Particle Sorting - Constriction - Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 4 5.1.1 Hydrodynamic Particle Sorting - Constrictions M. Yamada et al: Anal. Chem. 76 5465-5471 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 5 5.1.1 Hydrodynamic Particle Sorting - Constrictions http://pubs.acs.org/doi/suppl/10.1021/ac049863r M. Yamada et al: Anal. Chem. 76 5465-5471 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 6 V05 5.1.2 Hydrodynamic Particle Sorting - Straight Channel - Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 7 5.1.2 Hydrodynamic Particle Sorting - Straight Channel Hydrodynamic Particle Sorting in a Straight Channel < Segré-Silberberg Effect >  Laminar flow in microchannel  Parabolic flow profile  Dilute suspension of neutrally buoyant particles  Reynolds numbers not too small ( Re > 5) µF applications with Re > 1 are called inertial µF G. Segre, A. Silberberg: Nature 189 209–210 (1961) G. Segre, A. Silberberg: J Fluid Mech. 14: 136–157 (1962) D. DiCarlo et al.: PNAS 104 (48) 18892-18897 (2007) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 8 5.1.2 Hydrodynamic Particle Sorting - Straight Channel V05 1 Poiseuille flow produces a shear-gradient lift force FSG on the particle  drives the particle to the side walls of the channel FSG G. Segre, A. Silberberg: Nature 189 209–210 (1961) G. Segre, A. Silberberg: J Fluid Mech. 14: 136–157 (1962) D. DiCarlo et al.: PNAS 104 (48) 18892-18897 (2007) J.P. Matas et al.: Oil & Gas Science and Technology - Rev. IFP, 59 (1) 59-70 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 9 5.1.2 Hydrodynamic Particle Sorting - Straight Channel V05 10  The particle has a zero mean velocity relative to the fluid FSG  Due to the curvature of the velocity field, the fluid velocity will be absolutely higher on the wall side than on the centerline side in the reference frame of the particle  This dissymmetry will cause a lower pressure on the side where the velocity of the fluid is higher, leading the particle to migrate away from the axis until the wall pushes it away. FSG.. CSG. ρ… vMax.. a… Dh.. Shear gradient lift force Lift coefficient for the shear gradient lift force Fluid density Maximum velocity of the fluid Particle diameter Hydraulic diameter of the channel FSG  CSG ( x,RE )  J.P. Matas et al.: Oil & Gas Science and Technology - Rev. IFP, 59 (1) 59-70 (2004) J. Feng et al.: J. Fluid Mech. 277 271-301 (1994) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 2   vmax  a3 Dh 5.1.2 Hydrodynamic Particle Sorting - Straight Channel 2 Wall interaction force FWI  Walls are fixed (different boundary conditions on flow)  Wall interaction force FWI drives the particle away from the wall  FWI decreases sharply with increasing distance from the wall FWI G. Segre, A. Silberberg: Nature 189 209–210 (1961) G. Segre, A. Silberberg: J Fluid Mech. 14: 136–157 (1962) E.S. Asmolov: J. Fluid Mech. 381 63-87 (1999) L. Zeng et al.: J. Fluid Mech. 536 1-25 (2005) J.P. Matas et al.: Oil & Gas Science and Technology - Rev. IFP, 59 (1) 59-70 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 11 5.1.2 Hydrodynamic Particle Sorting - Straight Channel V05 12 With the appearance of a particle close to the wall,  the particle will move slightly slower than the fluid  the streamlines are diverted towards the side of the particle away from the wall FWI  CWI ( x, RE )  FWI.. CWI. ρ… vmax.. a… Dh..  v 2 max 4 h a 6 D Wall interaction force Lift coefficient for the wall interaction force Fluid density Maximum velocity of the fluid Particle diameter Hydraulic diameter of the channel and, which results in accelerated streamlines there  This asymmetric streamlines cause an imbalance of pressure on two sides of the particle, which generates a repulsive force, according to Bernoulli’s law J.M. Martel et al.: Annu Rev Biomed Eng 16 371-396 (2014) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.2 Hydrodynamic Particle Sorting - Straight Channel V05 13 Input Downstream Hydrodynamic Particle Sorting In Straight Channel Segre and Silberberg: J. Fluid Mech., 1962 Re > 5 In Equilibrium  Shear gradient lift force FSG = Wall interaction force FWI  Particles focus at the rim of channels Chun et al.: Phys. Fluids, 2006 Bhagat et al.: Lab Chip, 2008 Bhagat et al.: Phys. Fluids, 2008 Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.2 Hydrodynamic Particle Sorting - Straight Channel V05 14 Particle Arrangement Depends on Reynolds Number Re w Re  5 h  Focusing only possible aP  0.07 when Re > 5 and Dh 5  Re  20 Blocking ratio Flow direction 20  Re  100 D. Di Carlo: Lab Chip 9 2038-3046 (2009) A.A.S. Bhagat et al: Physics of Fluidics 20 101702 (2008) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Re ρ vm η ap Dh Reynolds number Re  Density of fluid Mean fluid velocity Dynamic viscosity Particle diameter Hydraulic diameter   v m  lc  V05 15 5.1.3 Hydrodynamic Particle Sorting - Curved Channel - Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.3 Hydrodynamic Particle Sorting - Curved Channel V05 16 In Curved Channels of Inertial µF Systems  In curved channels, a centrifugal force appears  Results in two counter-rotation vortices, called Dean vortices  Particles experience a force FD due to the transverse Dean flows A. A. S. Bhagat et al.: Biomed. Microdev. 12 187-195 (2010) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Re Reynolds number ap Particle diameter lc Characteristic length 5.1.3 Hydrodynamic Particle Sorting - Curved Channel V05 17 Dean Vortices  Dean vortices appear as a consequence of conservation of mass and incompressibility of fluid in the channel:  Adding horizontal fluid flow in the horizontal layer in an otherwise quiescent environment must be counter-balanced by the generation of another horizontal layer of flow in the opposite direction  Between the two layers, the fluid shear is forming the vortices Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.3 Hydrodynamic Particle Sorting - Curved Channel V05 18 In Curved Channels of Inertial µF Systems  Lift force FL forces particles to the walls  Dean force FD causes particles to move along the Dean vortices  Particles flowing near top and bottom wall experience a strong lateral flow due to FD moving to the inner wall  At the outer wall: FD ↑↑ FL  At inner wall: FD ↑↓ FL  A single equilibrium position of a particle near the inner channel wall A. A. S. Bhagat et al.: Biomed. Microdev. 12 187-195 (2010) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.3 Hydrodynamic Particle Sorting - Curved Channel V05 19 1.63 Dean force  Dh  4 FD  5.4 10      Re   2  R   Dean number De  aP De  Re Dh 2R Characteristic number for appearance of Dean vortices Dean vortex A. A. S. Bhagat et al.: Biomed. Microdev. 12 187-195 (2010) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 FD.. Dean force Dh.. Hydraulic diameter ap.. Particle diameter R … Radius of curved channel η … Viscosity 5.1.3 Hydrodynamic Particle Sorting - Curved Channel V05 20 Dean number De De  (inertial forces )( centripeda l forces ) Dh  Re viscous forces 2R William Reginald Dean (1896 -1973) De < 40 ~ 60 Non-directional flow De 40 ~ 60 - 64 ~75 Wavy perturbations De > 64 - 75 Pair of stable Dean vortices De > 75 - 200 Vortices present undulations, twisting, eventually merging and pair splitting De > 400 Turbulent flow W.R. Dean: doi 10.1080/14786440708564324 (1927) N. Nivedita et al: Sci. Rep. 7 44072 (2017) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.3 Hydrodynamic Particle Sorting - Curved Channel V05 21 Particles with Different Diameters in Curved Channel FL 2 R  a P      FD Dh  Dh  3 n v D    m h    , n  1    1. When R = 0 (straight channel) → FL / FD = 0, Dean force FD not relevant 2. Dependency FL / FD ~ aP3 Focusing only possible aP  0.07 when Re > 5 and lc A. A. S. Bhagat et al.: Biomed. Microdev. 12 187-195 (2010) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 FL FD Re ρ vm η ap Dh R Lift force Dean force Reynolds number Density of fluid Mean flow velocity Dynamic viscosity Particle diameter Hydraulic diameter Radius of channel curvature 5.1.3 Hydrodynamic Particle Sorting - Curved Channel wch hch pitch V05 22 = 500 µm = 220 µm = 1000 µm A. El Hasni, … U. Schnakenberg: Proc. Eng. 25 1197-1200 (2011), doi:10.1016/j.proeng.2011.12.295 Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.3 Hydrodynamic Particle Sorting - Curved Channel V05 23 Outer wall Inner wall Ø 20 µm Ø 40 µm Ø 60 µm A. El Hasni, … U. Schnakenberg: Proc. Eng. 25 1197-1200 (2011), doi:10.1016/j.proeng.2011.12.295 Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 24 5.1.4 Particle Sorting by Obstacles Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.4 Particle Sorting by Obstacles V05 25 Particle Separation by Obstacles  Here: Laminar Flow, Re < 1 !!! No inertial forces !!  Periodic arrangement of obstacles with periodicity λ (Fig. A)  Each row is shifted by factor of λ/n (in example: λ/3, n = 3)  Flow divides at obstacles (Fig. B)  The original flow profile exists at row n Top view of µF channel Flow direction Obstacle n=1 n=2 n=3 L.R. Huang et al.: Science 304 987-990 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.4 Particle Sorting by Obstacles V05 26 Particle Separation by Obstacles  Particles smaller than width of flow segment are transported within the segment and will follow the flow (Fig. B) (when no diffusion effects occur)  Zig-zag movement profile  At the nth obstacle row, particle at same position as at 1st obstacle row Flow direction Obstacle L.R. Huang et al.: Science 304 987-990 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.4 Particle Sorting by Obstacles V05 27 Particle Separation by Obstacles  Particles larger than flow segment will not follow the segment (Fig. C)  Particle deflect at next obstacle row → Dislocation movement Flow direction Obstacle L.R. Huang et al.: Science 304 987-990 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.1.4 Particle Sorting by Obstacles Periodicity 10 rows Schematic diagram of a microfluidic device for continuous-flow separation. The shift in register is 10%, created in practice by rotating a square lattice by 5.7 degrees. The matrix is flanked by many microfluidic channels, which make the flow uniform across the matrix. L.R. Huang et al.: Science 304 987-990 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 28 5.1.4 Particle Sorting by Obstacles V05 29  The 0.40 µm bead (green) stayed in one line, crossing a column of Flow velocity ~ 400 µm/s obstacles approximately every 10 rows (zigzag mode).  In contrast, the 1.03 µm bead (red) was displaced by the obstacles at each row (displacement mode). Measurements 11 mm after injection area L.R. Huang et al.: Science 304 987-990 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Sub-Conclusion: Hydrodynamic Particle Sorting Conclusion V 5.1 – Hydrodynamic Particle Sorting  Under laminar flow and at higher Reynolds numbers (Re > 5) particle sorting can be obtained in  Straight channels  Curved channels  Particle sorting for Re < 1 can be obtained with  Constrictions  Regular arrays of obstacles  Presented devices are  Passive  Applicable in 24/7 operation mode Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 30 V05 31 5.2 Valves Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2 Valves V05 32 Valves Passive Active  No moving parts  Movable parts  In direction of flow higher flow rate  Actuation of components necessary than in reverse direction (thermal, piezo electric, electric, pneumatic, ….)  Complex setup (higher degree of integration needed) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 33 5.2.1 Passive Valves Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.1 Passive Valves V05 34 Passive Valves Tesla Valve Nikola Tesla: US patent 1,329,559 (Feb.3, 1920) P.C. Sousa et al: J. Non-Newtonian Fluids 165 (11-12) 652-671 (2010) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Rectifier 5.2.1 Passive Valves – Tesla Valve V05 35 Tesla Valve Nikola Tesla: US patent 1,329,559 (Feb 3, 1920) A.B. Nojavani et al.: Int. J. Nat. Eng. Sci 6 (2) 65-69 (2012) https://en.wikipedia.org/wiki/Tesla_valve#/media/File:Tesla_valve_principle.svg Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.1 Passive Valves – Tesla Valve V05 36 Re  150 Nikola Tesla: US patent 1,329,559 (February 3, 1920) A.B. Nojavani et al.: Int. J. Nat. Eng. Sci 6 (2) 65-69 (2012) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 de.wikipedia.org open-source-energy.org gearslutz.com Tesla Valve Nikola Tesla (1856 - 1943) 5.2.1 Passive Valves – Tesla Valve Diodicity Di  Pr essure drop pr in reverse direction Pr essure drop p f in forward direction   50  L  150 µm T.Q. Truong et al.: Nanotech 1 (2003), www.nsti.org Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 37 cons tan t flowrate 5.2.1 Passive Valves - Rectifier V05 38 Microfluidic Rectifier forward Newtonian fluid backward In Newtonian fluids (e.g. water) no rectifier effect observable P.C. Sousa et al: J. Non-Newtonian Fluids 165 (11-12) 652-671 (2010) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Q … Volume flow rate 5.2.1 Passive Valves - Rectifier V05 39 Microfluidic Rectifier backward Viscoelastic fluid forward In viscoelastic fluids (e.g. water with wetting agents*) rectifier effect appears X.-B. Li et al.: Experimental Thermal and Fluid Science 39 1-16 (2012) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 *Wetting agents influence elasticity (stretching) 5.2.1 Passive Valves - Rectifier V05 40 Rectifier Works for Viscoelastic Fluids at  Small Reynolds numbers Re Weissenberg number Wi  elastic force viscous force www.bsr.org.uk  High Weissenberg numbers Wi  Measure for elasticity in fluids which are influenced by, e.g., wetting agents Wi is counterpart to Re for viscoelastic fluids Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Karl Weissenberg (1893 -1976) 5.2.1 Passive Valves - Rectifier V05 41 Re  Reynolds number Weissenberg number Wi  inertial force v  l viscous friction force  elastic force  v   2     viscous friction force l Wi high  Strong elastic behavior  Reduction of friction Wi low  Non-elastic fluids (Newtonian fluids) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 λ …. Relaxation time characterizes the elasticity d  dγ/d  Shear rate dt v … Velocity l … Characteristic length 5.2.1 Passive Valves V05 42 Conclusion Passive valves are not suitable in microfluidics for Newtonian fluids at low Reynolds numbers Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves V05 43 5.2.2 Active Valves Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Check Valve Check Valve made in PDMS M.L. Adams et al.: J. Micromech. Microeng. 15 1517-1521 (2005) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 44 5.2.2 Active Valves - Pneumatic Check Valve B. Yang et al.: J. Microelectromech. Systems 16 (2) 411-419 (2007) V05 45 J. Ni et al.: J. Micromech. Microeng. 20 095033 (7pp) (2010) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Pressure Driven Check Valve B. Mosadegh et al.: Nature Physics 6 433-437 (2010) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 46 5.2.2 Active Valves - Biomimetic Venous Check Valve V05 47 Biomimetic Venous Check Valve Distal (away from body) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Proximal (to the body) 5.2.2 Active Valves - Biomimetic Venous Check Valve Biomimetic venous valve in PDMS Principe of venous valve Venous valve in PDMS Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 48 5.2.2 Active Valves - Biomimetic Venous Check Valve V05 49 Deformation of Biomimetic Venous Flap Area of largest deformation Symmetry axis 0 µm 4.89 µm I. Klammer, …, U. Schnakenberg: J. Micromech. Microeng. 17 S122-127 (2007) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 10.01 µm 5.2.2 Active Valves - Biomimetic Venous Check Valve V05 50 Flow direction 100 µm Forward (opening) direction  preverse Di    p  forward Backward (closing) direction   V forward    V reverse  V  const.     p  const. I. Klammer, …, U. Schnakenberg: J. Micromech. Microeng. 17 S122-127 (2007) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Normally closed check valve Normally Closed Check Valve A. Buchenauer, … U. Schnakenberg: Biosensors and Bioelectronics 24 1411-1416 (2009) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 51 5.2.2 Active Valves - Normally closed check valve Reservoir V05 52 Well MTP Microfluidic device Pneumatic valve p = 60 kPa Ambient pressure Fluid layer Membrane Pneumatic layer p = 80 kPa Ambient pressure Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Normally closed check valve A. Buchenauer, … U. Schnakenberg: Biosensors and Bioelectronics 24 1411-1416 (2009) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 53 5.2.2 Active Valves - Normally closed check valve V05 54 Cultivation of E. coli in Terrific Broth (TB) Medium R1 R2 1 mol/L KCl 1 mol/L H3PO4  Cultivation of Escherichia coli for 19 h  Measurement of pH every 2 min  Dispensing of potassium chloride solution or phosphoric acid to adjust the pH value Controlled culture  Set point of pH value is 7.2  Orbital shaking with 800 rpm in radius of 3 mm Uncontrolled culture A. Buchenauer, … U. Schnakenberg: Biosensors and Bioelectronics 24 1411-1416 (2009) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Normally closed check valve V05 55 Cultivation of E. coli in Terrific Broth (TB) Medium R1 1 mol/L KCl KCl R2 1 mol/L H3PO4 H3PO4 Controlled culture Uncontrolled culture A. Buchenauer, … U. Schnakenberg: Biosensors and Bioelectronics 24 1411-1416 (2009) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Normally closed check valve Valve concept commercialized in Bioelector pro from m2p-labs  32 parallel working micro bioreactors  pH value controlled  Fed-batch  Online monitoring www.m2p-labs.com, now Beckman Coulter Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 56 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography www.bnl.gov Check Valves by Multiple Layer Soft Lithography in PDMS Stephen R. Quake (*1980) http://thebigone.stanford.edu/ www.fluidigm.com Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 57 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography Multiple Layer Soft Lithography V05 58 open no pressure pressure closed M.A. Unger et al.: Science 288 113 (2000) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 http://thebigone.stanford.edu/ 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography http://www.youtube.com/watch?v=biFyc23L40c Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 59 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography V05 60 The valve acts like a peristaltic pump  “Peristaltic pumps” are also called “roller pumps”  A flexible tube is fitted inside a circular pump casing  The rotor of the pump has a number of "wipers" or "rollers" attached to its external circumference, which compress the flexible tube as they rotate by  The part of the tube under compression is closed, which forced the fluid to move through the tube.  After the rollers passed by, the tube opens to its natural state and the fluid flows out  This process is called peristalsis https://www.youtube.com/watch?v=3H4Ftf_imrg Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography V05 61 On / Off valve 200 µm Peristaltic pump 200 µm Control valve http://thebigone.stanford.edu/ M.A. Unger et al.: Science 288 113 (2000) J. Melin et al.: Annu. Rev. Biophys. Biomol. Struct. 36 213-231 (2007) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 200 µm 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography Peristaltic Pump 3 mm I. Klammer and U. Schnakenberg: unpublished results Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 62 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography V05 63 Microfluidic Multiplexer open valve closed valve N flow channels can be addressed with only 2 log2 N control channels J. Melin et al.: Annu. Rev. Biophys. Biomol. Struct. 36 213-231 (2007) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography Large Scale Integration J. Melin et al.: Annu. Rev. Biophys. Biomol. Struct. 36 213-231 (2007) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 64 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography Large Scale Integration http://www.youtube.com/watch?v=AuofwnTAk C.L. Hansen et al.: Proc. Natl. Acad. Sci. 101 (40) 14431-14436 (2004) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 65 5.2.2 Active Valves - Check Valves by Multiple Layer Soft Lithography V05 66 Large Scale Integration Advantages  Best for high-throughput applications Drawbacks  High number of pneumatic  Flexible configurable in design (small amount of building blocks) inlets and outlets  PDMS  Flow control  Not inert for all chemicals  Multi-layer soft lithography  No portable devices  Cheap  Simple processing  Short fabrication times Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves V05 67 Other Types of Active Valves Electrostatic Thermopneumatic Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Magnetic 5.2.2 Active Valves - Electrostatic Valve V05 68 Electrostatic Valve Air Oil E. Yildirim et al.: Micromech. Microeng. 21 1050009 (9pp) (2011) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Thermopneumatic Valve V05 69 2 kPa Thermopneumatic Valve (peristaltic pump principle) J.C. Yoo et al.: Jap. J. Appl. Phys. 45 (1B) 519-522 (2006) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 5.2.2 Active Valves - Magnetic Valve V05 70 Magnetic Valve C.H. Cheng et al.: Proc. 3rd IEEE Int. Conf. Nano/Micro Engineered and Molecular Systems (2008) Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 Conclusion V05 71 Conclusion V 5.2 - Valves Passive valves  Rectifier effect with diodicities only around 2  Not suitable for microfluidics (Re < 1, Newtonian fluid) Active valves  Suitable for microfluidics  Preferably fabricated in flexible PDMS Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23 V05 72 One Minute Paper 1. What was the most important topic you understood? 2. What was the topic you didn‘t catch? Lecture „Microfluidic Systems - Bio-MEMS“ – Hydrodynamic Particle Sorting and Valves Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 23

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