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Microfluidic Systems - Bio-MEMS WS 2023/2024 lecture notes from RWTH Aachen University by Professor Uwe Schnakenberg.

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V1 Welcome ! Microfluidic Systems - Bio-MEMS WS 2023/2024 Prof. Dr. Uwe Schnakenberg Microfluidic Systems T: 0241 / 80 - 27842 [email protected] Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineeri...

V1 Welcome ! Microfluidic Systems - Bio-MEMS WS 2023/2024 Prof. Dr. Uwe Schnakenberg Microfluidic Systems T: 0241 / 80 - 27842 [email protected] Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1 V1 Microfluidic Systems - Bio-MEMS WS 2023/2024 Lecture V 23ws-61.41959 Friday, 10:30 am - 12:00 am Start October 13, 2023 Room: old Walter-Schottky building S2 Exercise UE 23ws-61.41960 Friday, 9:45 am - 10:30 am Start October 20, 2023 Room: old Walter-Schottky building S2 Jan Wagner, M.Sc. [email protected] T: 80 - 27836 Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 2 CV Uwe Schnakenberg V1 3 1986 Diplom-Physik degree (RWTH Aachen University) 1986 Fraunhofer-Institute for Silicon Technology (ISiT) in Berlin Uwe Schnakenberg working on development of microsystems and microsystem technologies 1994 Dr.-Ing. degree (TU Berlin) 1996 Research director at IWE1 of RWTH Aachen University focusing on microsystems and microfluidic systems 2015 Adjunct professor More than  > 120 peer-reviewed publications  > 140 conference proceedings  21 patents Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 General Information V1 General Information 1  Pdf-files of the lecture slides will be uploaded before presentation  All references as well as additional papers are uploaded  Appointments for oral exams will be made during the course General Information 2  Focus of the course is on an detailed overview of the most interesting effects and applications of microfluidic systems  Based on original papers  Detailed theoretical considerations are summarized in the references Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 4 General Information General Information 3 - Lecture and Exercise  The intention of the course is to initiate discussions  Questions and contributions are highly welcome  !! PLEASE ASK AND COMMENT ANYTIME !! Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 5 General Information V1 General Information 4 - Exercise  At the end of each lecture you are invited to answer two questions One Minute Paper 1. What was the most important topic you have understood? 2. What was the topic you didn‘t catch?  The compilation of the questions will be uploaded in moodle (UE 23ws-61.41960) latest Monday evenings  Answers must be prepared by students  Answers/Discussion in the following exercise before the next lecture Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 6 V1 Important Note All information provided are only for personal use. Dissemination is not allowed. Recording of lectures and exercises is not allowed. Prof. Dr. Uwe Schnakenberg Aachen, October 13, 2023 Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 7 Agenda „Microfluidic Systems - Bio-MEMS“ – WS 2023/2024 V1 October 13 Introduction V2 October 20 Process Technologies October 27 No lecture and tutorial/exercise V3 November 3 Fluid Mechanics I V4 November 10 Fluid Mechanics II November 17 No lecture and tutorial/exercise (Faculty day) V5 November 24 Hydrodynamic Particle Sorting, Valves V6 December 1 Diffusion, Passive Mixers V7 December 8 Surface Tension, Electrowetting V16 December 15 Capillary Effect, Paper-based Microfluidics V8 December 22 Droplets V9 January 12 Electrokinetics I Electroosmosis V10 January 19 Electrokinetics II Electrophoresis V11 January 26 Electrokinetics III Dielectrophoresis V13 February 2 Electrochemical Impedance Spectroscopy Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 8 Book Selection V1 9 O. Gescke, H. Klank, P. Telleman (eds.) Microsystem Engineering of Lab-on-a-Chip Devices Wiley-VCH, Weinheim, Germany, 2008, ISBN 978-3-527-31942-8 P. Tabeling. Introduction to Microfluidics Oxford University Press, Oxford, New York, NY, USA, 2009, ISBN 978-0-19-856864-3 N-T. Nguyen, S. T. Wereley Fundamentals and Applications of Microfluidics Artech House Inc, Norwood, MA, USA, 2006, ISBN 1-58053-972-6 Henrik Bruus Theoretical Microfluidics Oxford University Press, Oxford, New York, 2010, ISBN 978-0-19-923508-7 Jean Berthier, Pascal Silberzan Microfludics für Biotechnology Artech House, Norwood, MA, USA, 2010, ISBN: 978-1-59693-443-6 B.J. Kirby Micro- and Nanoscale Fluid Mechanics Cambridge University Press, New York, NY, ISBN 978-1-107-61720-9 S. Hardt, F. Schönfeld Microfluidic Technologies for Miniaturized Analysis Systems Springer, New York, NY, USA, 2007, ISBN 978-0-387-28597-9 Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 General Learning Targets V1 General Learning Targets  To be familiar with different microfluidic principles and platforms including advantages and drawbacks  To explain process technologies, design principles and operation modes of microfluidic systems  To be able to combine things together for advanced applications Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 10 Contents V1 Contents 1.1 Introduction 1.2 Definition of Terms 1.3 History 1.4 Characteristics 1.5 Market Forecast 1.6 Overview of Microfluidic Platforms Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 11 Learning Targets V1 Learning Targets for Today  To get a feeling of what microfluidics is  Definition of terms  Overview of characteristics of microfluidics  First impressions on microfluidic platforms Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 12 V1 1.1 Introduction Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 13 1.1 Introduction V1 Cilia Microfluidics in Nature Capillary Effect Lotus Effect Blood Flow Flagella https://www.youtube.com/watch?v=umUn8D6gEOg&list=PLE23BBF1CF45D95EF https://www.youtube.com/watch?v=bW3sqB7RTIc https://www.youtube.com/watch?v=Gs7ku8xA5so https://www.youtube.com/watch?v=4yBMY9Wj7z0 https://www.youtube.com/watch?v=Ah_mJBcWyDY Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 14 1.1 Introduction V1 Motivation for Microfluidic Systems Test Glass Automation Integration Miniaturization Automation Robot Integration Miniaturization Microfluidics Lab-on-Chip Automation Integration Miniaturization Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 15 1.1 Introduction V1 Objectives of  Fast handling of small fluid volumes Microfluidic Systems  Small footprint of devices  Low consumption of (expensive) reagents  Portable (point-of-use devices)  Robust  Easy-to-handle  Cheap  Disposable (one-time use) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 16 V1 1.2 Definition of Terms Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 17 1.2 Definition of Terms Fluid V1 18  Is a substance that continually deforms (flows) under an applied force Liquid Gas  Density ρgas ≈ 1 kg/m3  Density ρliquid ≈ 1000 kg/m3  Molecules move as free particles  Density comparable to solids  Interact through direct collisions  Dense packed molecules  Distance between gas molecules ≈ 3 nm  Distance between molecules ≈ 0.3 nm → compressible* → incompressible * according to the ideal gas law: the mass density ρ varies linearly with pressure Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.2 Definition of Terms V1 Compressibility of Gas  Under common experimental conditions, the pressure changes in the gas are sufficiently small that density changes in the gas are usually also small  But, when microchannels are sufficiently long that a gas flow is accompanied by a significant pressure change (say a 20% change in pressure); then the density will also change by approximately this amount Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 19 1.2 Definition of Terms Fluid mechanics Microfluidics V1  Deals with the mechanics of fluids and the forces on them  Fluid mechanics in confined area  Manipulation of fluids  in micro channels with dimensions between 1 µm and several 100 µm in height and width  in droplets with pL to fL volumes Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 20 1.2 Definition of Terms Pathline  V1 21 Pathline is the actual path (trajectory) that an individual fluid particle travels as time evolves. These can be thought of as "recording" the path of a fluid element in the flow over a time period long enough to trace, e.g., particle paths of small floating particles. Streamline  Streamline is a line that is everywhere tangent to the velocity vector at a given instant. Streamlines represent the velocity field at a specific instant of time. The tangent vectors constitute the velocity vector field of the flow. These vector fields show the direction in which a massless fluid element will travel at any point in time. Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.2 Definition of Terms Lab on (a) Chip V1 22  Device that integrates one or several laboratory functions and handles extremely small amounts of (LOC) fluid on a single chip of only millimeters to a few square centimeters Micro Total Analysis System (µTAS)  Device that automates and includes all necessary steps for (bio-)chemical analysis of a sample, e.g., sample preparation, sampling, sample transport, filtration, dilution, chemical reactions, separation, detection, waste management https://en.wikipedia.org/ A. Manz et al.: Sensors and Actuators, B1 244-248 (1990) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.2 Definition of Terms Bio-MEMS  V1 23 MEMS (Micro Electro Mechanical Systems) applied to bio(chemical) applications LOC, µTAS and Bio-MEMS are subsets of MEMS Biosensor  A device that uses specific biochemical reactions mediated by isolated enzymes, immunoassays, tissues, organelles or whole cells to detect chemical compounds usually by electrical, thermal or optical signals  First electrical biosensor was introduced by Clark and Lyons in 1962 for measurement of glucose https://goldbook.iupac.org/ L.C. Clark, C. Lyons: Ann. N.Y. Acad. Sci. 102 (1) 29–45 (1962) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.2 Definition of Terms Biomarker V1  A defined characteristic that is measured as an indicator of normal biological processes, pathogenic processes or responses to an exposure or intervention  Can be used as an indicator signaling an event or condition in a biological system or sample and giving a measure of exposure, effect, or susceptibility R.M. Califf. Experimental Biology and Medicine 243 213–221 (2018) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 24 1.2 Definition of Terms Assay V1  Analytic standardized procedure for measuring the presence, amount or functional activity of an analyte. The analyte can be a drug, a biochemical substance, or a cell in an organism or organic sample Immunoassay  Biochemical test that measures the presence or concentration of a molecule in a solution through the use of an antibody (standard) or an antigen (sometimes) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 25 V1 1.3 History of Microfluidics Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 26 1.3 History of Microfluidics 1 2 3 4 V1 1950 First developments in ink-jet printing technology 1978 First immunoassay based on capillary forces (glass chip)1 1979 First gas chromatography chip in silicon (Stanford University)2 1990 First high-pressure liquid chromatography chip silicon/Pyrex glass3 1990 Introduction of μTAS concept4 C. Glad, A.O. Grubb: Anal. Biochem. 85 180-187 (1978) S.C. Terry, J.H. Jerman, J.B. Angell: IEEE Trans. Electron. Dev. 26 1880-1886 (1979) A. Manz et al.: Sens. Actuators B 1 249-255 (1990) A. Manz et al.: Sens. Actuators B 1 244-248 (1990) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 27 1.3 History of Microfluidics 1990th Micro valves and micro pumps in silicon5 First paper-based test strips Abbot iSTAD platform (bood parameter) 5 6 7 8 9 1993 Introduction of soft-lithography6 1994 Si-/glass-chip for polymerase-chain-reaction (PCR)7 1997 First capillary electrophoresis chip in PDMS8 2000 Introduction of multi-layer soft-lithography9 P. Gravesen et al: J. Micromech. Microeng. 3 168-182 (1993) A. Kumar, G.M. Whitesides: Appl. Phys. Lett. 63 2002-2004 (1993) P. Wilding et al.: Clin. Chem. 40/9 1815-1818 (1994) C.S. Effenhauser et al: Anal. Chem. 69 3451-3457 (1997) M.A. Unger,.., S.R. Quake: Science 288 113-116 (2000) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 28 1.3 History of Microfluidics - Drivers 1. Molecular Diagnostics  Gas-Chromatography (GC)  High-pressure liquid chromatography (HPLC)  Capillary electrophoresis (CE) 2. DARPA (Defense Advanced Research Projects Agency)  Development of mobile microfluidic systems for detection of chemical and biological warfare agents  Since 1990 forced by research programs at US universities 3. Molecular Biology  Genomics (science focusing on the structure, function, evolution, mapping, and editing of genomes) 4. Micro Electronics  Thin-film semiconductor technologies G.W. Whitesides: Nature 442 368-373 (2006) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 29 V1 1.4 Characteristics of Microfluidics Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 30 1.4 Characteristics of Microfluidics V1 31 Characteristics of Microfluidics  Chips / Systems with small footprint  Efficient mass transport  Low thermal mass  Low energy consumption  Laminar flow (allows predictable flow profile)  Large surface-to-volume ratio  in micro channels  in droplets Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1 nl 1 pl 1 µL … 1 mm3 1 nL … (100 µm)3 1 pL … (10 µm)3 1 fL … 1 µm3 1 mm 1 µl  Smallest volumes (nL → fL) 1.4 Characteristics of Microfluidics V1 Laminar Flow Flow direction http://www.youtube.com/watch?v=5QVwljd04Kw Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 32 1.4 Characteristics of Microfluidics http://www.youtube.com/watch?v=_dbnH-BBSNo Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 33 1.4 Characteristics of Microfluidics V1 34 www.wikipedia.com Capillary Force / Surface Tension http://www.youtube.com/watch?v=UtRIk4TwQDQ red (left): θ < 90° blue (right): θ > 90° Θ … Contact angle Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.4 Characteristics of Microfluidics Diffusion V1 Diffusion at boundary surface of two fluids allow mixing without turbulences according to large surface-to-volume ratio in micro channels Inlet Inlet www.umech.mit.edu Outlet Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 35 1.4 Characteristics of Microfluidics V1 Generic Components of Microfluidic Systems Processing Inlet Guidance merge mix detect clean separate dilute … www.biophot.caltech.edu/ Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 Guidance Outlet 36 1.4 Characteristics of Microfluidics Microfluidic Systems  Microfluidic systems are typically made of  Transparent polymer (PDMS*, SU-8**) (in many cases in combination with glass sides)  Glass  Production/Fabrication in expensive clean rooms is not necessary, but desirable  Optical detection methods preferred which are typically used in (bio-)chemical analytics * PDMS.. Poly(dimethylsiloxane) ** SU-8 … Negative photo resist from Microchem Corp. Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 37 1.4 Characteristics of Microfluidics V1 38 Interdisciplinarity of Microfluidic Systems and Bio-MEMS Thermodynamic Design Optic Medicine (Diagnostics und Therapeutics) Fluidmechanics Microfluidic Systems MEMS / NEMS Bio-MEMS Chemistry and Biochemistry Physical Chemistry (Micro-) Electronics Systems Engineering Data Processing Sensors Actuators Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 1.5 Market Forecast Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 39 1.5 Market Forecast Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 40 1.5 Market Forecast V1 CAGR … Compound annual growth rate Dx......... Diagnostics https://www.yolegroup.com/product/report/status-of-the-microfluidics-industry-2022/ Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 41 1.5 Market Forecast Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 42 1.5 Market Forecast V1 43 https://www.yolegroup.com/product/report/microfluidics-based-on-point-of-need-testing-2023/ Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.5 Market Forecast V1 44 https://www.yolegroup.com/product/report/microfluidics-based-on-point-of-need-testing-2023/ Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.5 Market Forecast Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 45 1.5 Market Forecast V1 Cited compagnies in the Yole market forecast 2022 https://www.yolegroup.com/product/report/status-of-the-microfluidics-industry-2022/ Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 46 V1 1.6 Microfluidic Platforms Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 47 1.6 Microfluidic Platforms V1 Microfluidic Platforms Defined by Actuation Principle / Applied Force Pressure Capillary Magnetic Microfluidic Platform Acoustic Electrokinetic Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 Centrifugal 48 1.6 Microfluidic Platforms V1 49 Microfluidic Platforms defined by actuation principles / applied forces V4-8 V16 Capillary effect Pressure driven V15 Magnetic Microfluidic V1 Centrifugal force Platform V12 V7 V9-11 Acoustic Electrokinetic Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 Will be addressed in this semester 1.6 Microfluidic Platforms V1 Microfluidic Platform Pressure Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 50 1.6 Microfluidic Platform – Pressure driven V1 Pressure Driven Microfluidic Platform  Pressure driven fluid transport through channels  Connection of inlet to syringe pumps Syringe pump http://www.aixtek.com/ www.hll.de which push the fluid through the channel Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 51 1.6 Microfluidic Platforms V1 Microfluidic Platform Centrifugal Compact Disc Microfluidics Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 52 1.6 Microfluidic Platform – Centrifugal V1 53 Centrifugal force  Micro structured disc  Fluid transport in micro channels through rotation of a disc depends on  Rotation velocity ω http://www.uci.edu/  Channel dimensions  Fluid velocities: nL/s …. mL/s  Transport from inside to outside  Relevant forces  Euler  Coriolis  Capillary www.genomic.ch Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.6 Microfluidic Platform – Centrifugal V1 54 Example for Processing i. Buffer (red) pumped in reaction chamber (rotation @ 27 Hz for 1 min) ii. Mixing (alternating rotation for 2 min) iii. Capillary forces drive buffer to distributor chamber iv. Rotation (@ 6 Hz) drive buffer in detection chambers K. Lutz et al: Lab Chip 10 887-893 (2010) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.6 Microfluidic Platform – Centrifugal M. Madou et al.: Ann. Rev. Biomed. Eng. 8 601-628 (2006) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 55 1.6 Microfluidic Platform – Centrifugal V1 Picollo®-Xpress-Platform von Abaxis Detection of clinically relevant blood parameters Addition of analyte Disc insert Printing of results www.picolloxpress.com, www.abaxis.com Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 Disc 56 1.6 Microfluidic Platform – Centrifugal https://www.youtube.com/watch?v=MSB-BvOGkHQ Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 57 1.6 Microfluidic Platform – Centrifugal V1 Commercial Providers (not complete)  Abaxis  Skyla  Samsung  Biosurfit  Focus Diagnostics (3M)  Radisens Diagnostics  Roche (Panasonic)  GenePOC-Diagnostics  Capital Bio  Spin Chip Diagnostics  Gyros AB  Espira Inc.  LaMotte  …. Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 58 1.6 Microfluidic Platform – Centrifugal V1 Centrifugal Force-based Microfluidic Platforms Advantages  Disposable cartridge (one-time use) Drawbacks  No flexibility  Small number of components  Easy handling  Large footprints of components  Precise fluid management  Relatively large reagent volumes  High-volume production  Automatization of readout needed  Different rotation speeds needed  Parallel processing on CD Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 59 1.6 Microfluidic Platforms V1 Microfluidic Platform Electrokinetic Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 60 1.6 Microfluidic Platform – Electrokinetic V1 Electrokinetic Platforms Manipulation through Electric Fields Electroosmosis (EOF) Capillary Electrophoresis (EP) Dielectrophoresis (DEP) Transport of fluid Transport of fluid and charged molecules Transport of polarizable particles Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 61 1.6 Microfluidic Platform – Electrokinetic V1 Capillary Electrophoresis Systems for Protein and Nucleic Acids Separations Caliper Life Science, MA, USA Agilent Technologies CA, USA www.caliperls.com www.agilent.com 2100 Bioanalyser Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 62 1.6 Microfluidic Platform – Electrokinetic V1 Electrowetting (EWOD) or Digital Microfluidics (DMF)  Transport of droplets on hydrophobic surfaces using electric fields  Wetting behavior changes with electric field application  Droplet shape change or droplet movement insulator http://www.youtube.com/watch?v=Tjp9qxob9pw F. Mugele, J.C. Barat, J. Phys.: Condens. Matter. 17 R705-R774 (2005) Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 63 1.6 Microfluidic Platforms V1 Microfluidic Platform Acoustic Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 64 1.6 Microfluidic Platform – Acoustic V1 65 Microfluidic Platform Acoustic  Transport through surface acoustic waves (SAW)  piezoelectric substrate  Interdigitated electrodes for acoustic wave generation at surface Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 1.6 Microfluidic Platform – Acoustic http://www.youtube.com/watch?v=FaOqyJpT7AM Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 V1 66 1.6 Microfluidic Platform – Capillary and Magnetic V1 67 Microfluidic Platform Microfluidic Platform Capillary Magnetic https://www.youtube.com/watch?v=FKFu7u_gFD4 https://www.youtube.com/watch?v=noPdBj-xg04 Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 Conclusion V1 V1 Conclusion V1  Microfluidics is an emerging R&D field since 1990  Microfluidic systems and Bio-MEMS  Are simple to process and cheap in production  In may cases disposable chips are used  Manageable/Limited number of platforms  In many cases already commercialized  Main application areas  Life science  Biochemical diagnostics Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 68 V1 One Minute Paper 1. What was the most important topic you understood? 2. What was the topic you didn‘t catch? Course „Microfluidic Systems - Bio-MEMS“ - V01 Introduction Prof. Dr.-Ing. Uwe Schnakenberg | Institute of Materials in Electrical Engineering 1 | WS 2023 69

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