Podcast
Questions and Answers
What is the primary goal of stacking wafers vertically during chemical vapor deposition?
What is the primary goal of stacking wafers vertically during chemical vapor deposition?
- To decrease the velocity of the gas flow
- To decrease the thickness of the boundary layer
- To increase the temperature of the reaction
- To increase the throughput of the process (correct)
What is the direction of gas flow in the reactor?
What is the direction of gas flow in the reactor?
- Along the susceptor
- x-direction (correct)
- Across the stagnant layer
- y-direction
What is the effect of the boundary layer on the mass transfer coefficient?
What is the effect of the boundary layer on the mass transfer coefficient?
- It decreases the mass transfer coefficient (correct)
- It increases the mass transfer coefficient
- It has no effect on the mass transfer coefficient
- It depends on the temperature of the reaction
What is the purpose of using gas injectors along the tube in chemical vapor deposition?
What is the purpose of using gas injectors along the tube in chemical vapor deposition?
What is the desired flow regime in chemical vapor deposition?
What is the desired flow regime in chemical vapor deposition?
What is the assumption made in the CVD growth rate model?
What is the assumption made in the CVD growth rate model?
What is the effect of reducing pressure from 1 atmosphere to 1 Torr on hG?
What is the effect of reducing pressure from 1 atmosphere to 1 Torr on hG?
What is the primary advantage of operating in a reaction limited regime in LPCVD?
What is the primary advantage of operating in a reaction limited regime in LPCVD?
Why is a 5-25°C temperature gradient often created in LPCVD?
Why is a 5-25°C temperature gradient often created in LPCVD?
What is the effect of low pressure on auto-doping in LPCVD?
What is the effect of low pressure on auto-doping in LPCVD?
What is the typical operating pressure range for LPCVD reactors?
What is the typical operating pressure range for LPCVD reactors?
In which mode can PECVD avoid charge buildup for insulators?
In which mode can PECVD avoid charge buildup for insulators?
Why can wafers be stacked vertically in LPCVD reactors?
Why can wafers be stacked vertically in LPCVD reactors?
What is a limiting factor of the reaction rate in a CVD process?
What is a limiting factor of the reaction rate in a CVD process?
What is the typical process temperature range for PECVD?
What is the typical process temperature range for PECVD?
What type of CVD is commonly used for epitaxial growth of III-V compounds for optoelectronic devices?
What type of CVD is commonly used for epitaxial growth of III-V compounds for optoelectronic devices?
What is the main difference between PECVD and sputter deposition?
What is the main difference between PECVD and sputter deposition?
What is the sequence of steps involved in a CVD process?
What is the sequence of steps involved in a CVD process?
What is the condition for out-diffusion to occur in CVD film growth?
What is the condition for out-diffusion to occur in CVD film growth?
What is the main drawback of Atmospheric Pressure Chemical Vapor Deposition (APCVD)?
What is the main drawback of Atmospheric Pressure Chemical Vapor Deposition (APCVD)?
What is the advantage of operating at low pressure in Chemical Vapor Deposition (CVD)?
What is the advantage of operating at low pressure in Chemical Vapor Deposition (CVD)?
What is the relationship between the gas diffusion coefficient (DG) and the total pressure (Ptotal) in the mass transfer limited regime?
What is the relationship between the gas diffusion coefficient (DG) and the total pressure (Ptotal) in the mass transfer limited regime?
What is the reason for the low throughput of APCVD?
What is the reason for the low throughput of APCVD?
What is the configuration required for APCVD at high temperature?
What is the configuration required for APCVD at high temperature?
What is a consequence of shadowing in directional diffusion to the surface?
What is a consequence of shadowing in directional diffusion to the surface?
What is a drawback of cold wall reactors compared to hot wall reactors?
What is a drawback of cold wall reactors compared to hot wall reactors?
What is the primary mechanism of energy transfer in PECVD?
What is the primary mechanism of energy transfer in PECVD?
What is the typical frequency used in PECVD?
What is the typical frequency used in PECVD?
What is the primary benefit of the energy supplied by the plasma in PECVD?
What is the primary benefit of the energy supplied by the plasma in PECVD?
