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Questions and Answers
What is the function of the Angular Energy Filter Component?
What is the function of the Angular Energy Filter Component?
Which component is responsible for blocking the beam during Autotune and Wafer exchange?
Which component is responsible for blocking the beam during Autotune and Wafer exchange?
What is the primary function of the Beam Profiler Movements?
What is the primary function of the Beam Profiler Movements?
In the context provided, what do the Dose Cups Component primarily do?
In the context provided, what do the Dose Cups Component primarily do?
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Which component is responsible for transforming fan shape to a parallel scanned beam?
Which component is responsible for transforming fan shape to a parallel scanned beam?
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