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Questions and Answers
What is the function of the Angular Energy Filter Component?
What is the function of the Angular Energy Filter Component?
- Rotating to block the beam during certain operations
- Analyzing the beam for desired species (correct)
- Transforming fan shape to parallel scanned beam
- Scanning the beam horizontally
Which component is responsible for blocking the beam during Autotune and Wafer exchange?
Which component is responsible for blocking the beam during Autotune and Wafer exchange?
- Dose Cups Component
- Beam Profiler Movements
- Energy Slits Component (correct)
- Corrector Magnet
What is the primary function of the Beam Profiler Movements?
What is the primary function of the Beam Profiler Movements?
- Blocking the beam during specific operations
- Rotating the beam by 90 degrees (correct)
- Scanning the beam horizontally
- Transforming fan shape to parallel scanned beam
In the context provided, what do the Dose Cups Component primarily do?
In the context provided, what do the Dose Cups Component primarily do?
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Which component is responsible for transforming fan shape to a parallel scanned beam?
Which component is responsible for transforming fan shape to a parallel scanned beam?
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