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What is the main generic challenge associated with lithography?
What is the main generic challenge associated with lithography?
Which technology aspect of sources is important for ensuring high resolution of a focused probe or projected pattern?
Which technology aspect of sources is important for ensuring high resolution of a focused probe or projected pattern?
In projection lithography, what is required for fabrication of each unique pattern?
In projection lithography, what is required for fabrication of each unique pattern?
What type of exposure is used in the serial or direct write mode?
What type of exposure is used in the serial or direct write mode?
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What characteristics should resist materials have to enable high throughput in lithography?
What characteristics should resist materials have to enable high throughput in lithography?
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