MEMS Gear Quiz and Flashcards: Motor and Gear Train

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Questions and Answers

Which organization provides movies of a motor and gear train related to MEMS?

Boeing

Sandia National Laboratory (correct)

NASA

European Space Agency

What are the alternative names for MEMS as mentioned in the text?

Nanomaterials and Nanofabrication

Microsystems and Micro-technology (MST) (correct)

Nanostructures and Nanotechnology

Nanoscience and Nanotechnology

What are the objectives of the course program as mentioned in the text?

Understand the principles of quantum mechanics in MEMS design

Explore the historical development of MEMS technology

Perform a detailed analysis of the MEMS industry trends

Identify and describe the most commonly used fabrication processes in making MEMS devices (correct)

What are students expected to be able to do through the student work in the course program?

List a number of common MEMS transducers and explain their operating principles Signup and view all the answers

What is one of the specific topics covered in the course program according to the text?

MEMS Transducers and Their Operating Principles Signup and view all the answers

What is the focus of the course program according to the text?

An introductory treatment of MEMS, also known as microsystems and micro-technology (MST) Signup and view all the answers

What can students gain experience in, through the course program?

Using English language as a means of expressing technical ideas Signup and view all the answers

What is elastic theory used for, according to the text?

Predicting the stress/strain state of MEMS devices Signup and view all the answers

Which organization provides an overview and objectives for a course on MEMS?

Sandia National Laboratory Signup and view all the answers

What is Sandia National Laboratory's focus according to the text?

MEMS (microsystems and micro-technology) research Signup and view all the answers

Which type of motor can be used in reverse as an actuator?

Comb drive Signup and view all the answers

What is the acronym MEMS used for?

Micro-Electro-Mechanical Systems Signup and view all the answers

What is the basic unit of measure in MEMS?

Micrometer Signup and view all the answers

What do most accelerometers use to sense acceleration?

Electrical capacitance Signup and view all the answers

In which type of device can MEMS accelerometers be widely found?

Automobiles Signup and view all the answers

What is the acronym for 'Focused ion beam instruments'?

FIB Signup and view all the answers

Which book is suggested as a reference for introductory MEMS?

Introductory MEMS: Fabrication and Applications by Thomas Adams and Richard Layton, Springer Signup and view all the answers

What is the working equation for conduction?

$Q = \frac{kA(T1 - T2)}{d}$ Signup and view all the answers

Which material has the highest thermal conductivity among the listed options?

Copper Signup and view all the answers

What is the combined heat transfer mode of conduction and advection known as?

Convection Signup and view all the answers

What is the equation for radiation heat transfer?

$Q = \frac{\epsilon_1T_1^4 - \epsilon_2T_2^4}{A}$ Signup and view all the answers

What is the equation for convective heat transfer?

$Q̇ = hA(T_1 - T_2)$ Signup and view all the answers

What does the symbol $T_∞$ represent in the context of convective heat transfer?

The ambient temperature Signup and view all the answers

What is the equation for heat transfer through radiation for a perfect blackbody?

$Q̇ = \epsilon\sigma A(T_S^4 - T_{sur}^4)$ Signup and view all the answers

What does the symbol $T_S$ represent in the context of radiation heat transfer?

The temperature of a small object Signup and view all the answers

In the context of thermal actuators, what does the symbol $ω_{tip}$ represent?

Mechanical output (motion) Signup and view all the answers

What is the equation for voltage drop across the hot arm in terms of input voltage, resistivity, and geometry?

$eρ(L/A_h)$ Signup and view all the answers

What is the equation for temperature of the cold arm in terms of input voltage, resistivity, geometry, and heat transfer coefficient?

$T_c = e(A_h + A_c)/A_c$ Signup and view all the answers

What is the thermal strain when the hot arm is initially at $T_∞$ and is then heated to $T_h$?

$\alpha T_h (T_h - T_∞)$ Signup and view all the answers

In the context of thermal actuators, which arm experiences an extra piece of strain due to being hooked to another component?

Hot arm Signup and view all the answers

What are initial stresses experienced by in a thermal actuator?

Hot arm only. Signup and view all the answers

In thermal actuators, what does ε represent?

Thermal strain. Signup and view all the answers

What does Q̇conv stand for in thermal actuators?

Convective heat transfer. Signup and view all the answers

Study Notes

MEMS Course Overview

The course provides an overview and objectives for a course on Micro-Electro-Mechanical Systems (MEMS).
The focus of the course program is on MEMS, which is also known as Micro-Systems Technology (MST) or Micro-Nano Systems.

Objectives and Expectations

The objectives of the course program include understanding the design, fabrication, and application of MEMS devices.
Students are expected to be able to design, fabricate, and test MEMS devices through hands-on activities and projects.

MEMS and Applications

One of the specific topics covered in the course program is the design and fabrication of thermal actuators.
Students can gain experience in the design, fabrication, and testing of MEMS devices, including thermal actuators.
MEMS devices are widely used in applications such as accelerometers, which can sense acceleration.

Elastic Theory and Thermal Conductivity

Elastic theory is used to analyze the thermal strain in thermal actuators.
The basic unit of measure in MEMS is the micron (μm).
Materials with high thermal conductivity, such as copper, are used in MEMS devices.

Heat Transfer and Thermal Actuators

The combined heat transfer mode of conduction and advection is known as convection.
The equation for radiation heat transfer is Q̇rad = ε * σ * (Ts^4 - T∞^4), where ε is the emissivity and σ is the Stefan-Boltzmann constant.
The equation for convective heat transfer is Q̇conv = h * A * (Ts - T∞), where h is the heat transfer coefficient and A is the surface area.
The working equation for conduction is Q̇cond = k * A * (dT/dx), where k is the thermal conductivity and dT/dx is the temperature gradient.

Thermal Actuators and Strain

In thermal actuators, the hot arm experiences thermal strain due to heating.
The thermal strain is given by ε = α * ΔT, where α is the thermal expansion coefficient and ΔT is the temperature change.
The equation for voltage drop across the hot arm is ΔV = I * R, where I is the current and R is the resistance.
The equation for temperature of the cold arm is Tc = Vin / (R * I), where Vin is the input voltage.

Symbols and Notations

The symbol T∞ represents the ambient temperature in heat transfer.
The symbol Ts represents the surface temperature in radiation heat transfer.
The symbol ε represents the emissivity in radiation heat transfer.
The symbol ωtip represents the angular frequency in thermal actuators.

Focused Ion Beam Instruments

The acronym FIB stands for Focused Ion Beam instruments.

References

The book "MEMS: A Practical Approach" is suggested as a reference for introductory MEMS.

Sandia National Laboratory

Sandia National Laboratory provides movies of a motor and gear train related to MEMS and focuses on the development of MEMS devices.

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Description

Explore movie and still picture galleries featuring motors and gear trains from Sandia National Laboratory, as well as an overview of the course and its objectives.

Introduction to MEMS: Motor and Gear Train

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