Gap Axis Tuning in AXCELIS Systems
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Questions and Answers

What is recommended for heating up the source before creating a new beam?

  • Xenon beam
  • Krypton beam
  • Argon beam (correct)
  • Neon beam

    • Which element should be given a chance to heat up to equilibrium before creating a new beam?

  • Wafer
  • Ion path
  • Source body and electrode (correct)
  • Manipulator settings

    • What might happen if a recipe history is saved while the source is not at thermal equilibrium?

  • The ion path will be optimized
  • The wafer will be properly heated
  • The AutoTune will not start the recipe (correct)
  • The manipulator settings will be correct

    • What is the maximum extraction voltage mentioned in the document?

    <p>60kV</p> Signup and view all the answers

    When is the use of an Argon beam recommended according to the text?

    <p>For creating a new beam</p> Signup and view all the answers

    What type of tuning procedure is suggested for tools with existing recipes?

    <p>Recipe-based tuning procedure</p> Signup and view all the answers

    Which part of the tool should be allowed to reach thermal equilibrium before saving recipe history?

    <p>Source body and electrode</p> Signup and view all the answers

    What could happen if manipulator settings are saved when the source is not at thermal equilibrium?

    <p>The next AutoTune attempt will fail</p> Signup and view all the answers

    What is recommended before starting an AutoTune for a recipe?

    <p>Ensuring source body and electrode are at equilibrium</p> Signup and view all the answers

    What is the purpose of this document according to the text?

    <p>Provide beam tuning guidelines</p> Signup and view all the answers

    Why is it recommended to start tuning from existing recipes in the tool?

    <p>To reduce the risk of errors</p> Signup and view all the answers

    What is the significance of allowing the source body and electrode to reach thermal equilibrium?

    <p>Ensures accurate manipulator settings</p> Signup and view all the answers

    What happens if a recipe history is saved while the source is not at thermal equilibrium?

    <p>Manipulator settings might not be correct</p> Signup and view all the answers

    Why is an Argon beam recommended for heating up the source?

    <p>It helps in achieving thermal equilibrium</p> Signup and view all the answers

    What is the max extraction voltage mentioned in the document?

    <p>$60$ kV</p> Signup and view all the answers

    When should AutoTune try to start a recipe according to the document?

    <p>When source heating is complete</p> Signup and view all the answers

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