16 Questions
What is recommended for heating up the source before creating a new beam?
Argon beam
Which element should be given a chance to heat up to equilibrium before creating a new beam?
Source body and electrode
What might happen if a recipe history is saved while the source is not at thermal equilibrium?
The AutoTune will not start the recipe
What is the maximum extraction voltage mentioned in the document?
60kV
When is the use of an Argon beam recommended according to the text?
For creating a new beam
What type of tuning procedure is suggested for tools with existing recipes?
Recipe-based tuning procedure
Which part of the tool should be allowed to reach thermal equilibrium before saving recipe history?
Source body and electrode
What could happen if manipulator settings are saved when the source is not at thermal equilibrium?
The next AutoTune attempt will fail
What is recommended before starting an AutoTune for a recipe?
Ensuring source body and electrode are at equilibrium
What is the purpose of this document according to the text?
Provide beam tuning guidelines
Why is it recommended to start tuning from existing recipes in the tool?
To reduce the risk of errors
What is the significance of allowing the source body and electrode to reach thermal equilibrium?
Ensures accurate manipulator settings
What happens if a recipe history is saved while the source is not at thermal equilibrium?
Manipulator settings might not be correct
Why is an Argon beam recommended for heating up the source?
It helps in achieving thermal equilibrium
What is the max extraction voltage mentioned in the document?
$60$ kV
When should AutoTune try to start a recipe according to the document?
When source heating is complete
Learn about the rough starting recommendation for setting the Gap in AXCELIS systems, the importance of tuning the Gap Axis parameter, and how to manually invoke Automatic peaking of the gap. Understand how to minimize the Extraction Suppression Voltage by fine-tuning the Gap.
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