Gap Axis Tuning in AXCELIS Systems

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Questions and Answers

What is recommended for heating up the source before creating a new beam?

  • Xenon beam
  • Krypton beam
  • Argon beam (correct)
  • Neon beam

Which element should be given a chance to heat up to equilibrium before creating a new beam?

  • Wafer
  • Ion path
  • Source body and electrode (correct)
  • Manipulator settings

What might happen if a recipe history is saved while the source is not at thermal equilibrium?

  • The ion path will be optimized
  • The wafer will be properly heated
  • The AutoTune will not start the recipe (correct)
  • The manipulator settings will be correct

What is the maximum extraction voltage mentioned in the document?

<p>60kV (A)</p> Signup and view all the answers

When is the use of an Argon beam recommended according to the text?

<p>For creating a new beam (D)</p> Signup and view all the answers

What type of tuning procedure is suggested for tools with existing recipes?

<p>Recipe-based tuning procedure (D)</p> Signup and view all the answers

Which part of the tool should be allowed to reach thermal equilibrium before saving recipe history?

<p>Source body and electrode (B)</p> Signup and view all the answers

What could happen if manipulator settings are saved when the source is not at thermal equilibrium?

<p>The next AutoTune attempt will fail (C)</p> Signup and view all the answers

What is recommended before starting an AutoTune for a recipe?

<p>Ensuring source body and electrode are at equilibrium (B)</p> Signup and view all the answers

What is the purpose of this document according to the text?

<p>Provide beam tuning guidelines (C)</p> Signup and view all the answers

Why is it recommended to start tuning from existing recipes in the tool?

<p>To reduce the risk of errors (D)</p> Signup and view all the answers

What is the significance of allowing the source body and electrode to reach thermal equilibrium?

<p>Ensures accurate manipulator settings (C)</p> Signup and view all the answers

What happens if a recipe history is saved while the source is not at thermal equilibrium?

<p>Manipulator settings might not be correct (B)</p> Signup and view all the answers

Why is an Argon beam recommended for heating up the source?

<p>It helps in achieving thermal equilibrium (C)</p> Signup and view all the answers

What is the max extraction voltage mentioned in the document?

<p>$60$ kV (D)</p> Signup and view all the answers

When should AutoTune try to start a recipe according to the document?

<p>When source heating is complete (D)</p> Signup and view all the answers

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