Extreme Ultraviolet Lithography (EUVL) Quiz
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Questions and Answers

What is the wavelength range used in extreme ultraviolet lithography (EUVL)?

  • 30 nm
  • 13.5 nm (correct)
  • 40 nm
  • 20 nm

    • Which company is the sole producer of EUV systems for chip production as of 2023?

  • Samsung
  • Intel
  • ASML Holding (correct)
  • TSMC

    • At what process nodes is ASML Holding targeting with its EUV systems?

  • 7 nm and 5 nm
  • 10 nm and 7 nm
  • 3 nm and 1 nm
  • 5 nm and 3 nm (correct)

    • What was the minimum metal pitch reduction reported by TSMC for its 5 nm node compared to its 7 nm node?

    <p>30% (D)</p> Signup and view all the answers

    What is the ideal EUV source development focused on?

    <p>Plasmas generated by laser or discharge pulses (B)</p> Signup and view all the answers

    Why does the mirror responsible for collecting the light in EUVL systems need to be replaced every year?

    <p>It is vulnerable to damage from high-energy ions and other debris (A)</p> Signup and view all the answers

    What is the wall plug efficiency reported for EUV according to Hynix at the 2009 EUV Symposium?

    <p>~0.02% (B)</p> Signup and view all the answers

    What is the weight of a typical EUV tool?

    <p>180 tons (D)</p> Signup and view all the answers

    What is the energy consumption comparison between EUV tools and immersion tools?

    <p>EUV tools consume at least 10× more energy than immersion tools (C)</p> Signup and view all the answers

    How is EUV radiation emitted in matter?

    <p>Ionization must precede EUV emission in matter (D)</p> Signup and view all the answers

    What is the established EUV light source as of 2016?

    <p>A laser-pulsed tin plasma (B)</p> Signup and view all the answers

    What is the degradation rate of EUV collector reflectivity per billion 50 kHz pulses?

    <p>~0.1–0.3% (A)</p> Signup and view all the answers

    Which type of light was eventually used in the development of lithography technology?

    <p>13.8nm (D)</p> Signup and view all the answers

    What led to initial skepticism surrounding Extreme Ultraviolet (EUV) lithography?

    <p>Absorption by glass and air (C)</p> Signup and view all the answers

    Which organizations were involved in the US Department of Energy-funded research for EUV technology?

    <p>Livermore, Berkeley, and Sandia National Laboratories (A)</p> Signup and view all the answers

    What resulted from the Cooperative R&D Agreement (CRADA) between private companies and the Labs?

    <p>Formation of EUV-LLC (C)</p> Signup and view all the answers

    Who was denied licensing of the EUV technology?

    <p>Japanese companies (D)</p> Signup and view all the answers

    What company became the sole benefactor of the EUV technology?

    <p>ASML (D)</p> Signup and view all the answers

    By what year were lithography machines capable of producing up to 200 wafers per hour?

    <p>2022 (A)</p> Signup and view all the answers

    What solidified ASML's position as the world leader in lithography technology?

    <p>Use of Zeiss optics (A)</p> Signup and view all the answers

    Whose record turnover in 2021 surpassed competitors Canon and Nikon?

    <p>ASML (C)</p> Signup and view all the answers

    Which country pressured Dutch authorities not to sell the EUV machines to China?

    <p>US (D)</p> Signup and view all the answers

    Why is a vacuum required for EUV lithography?

    <p>Due to the absorption of EUV radiation by all matter (C)</p> Signup and view all the answers

    What do EUV photomasks mainly consist of?

    <p>Alternating layers of molybdenum and silicon (A)</p> Signup and view all the answers

    What is the main aim of Section C(i) from the 2017 CICM Primary Syllabus?

    <p>To define and explain dose-effect relationships of drugs, including dose-response curves with reference to graded and quantal response (C)</p> Signup and view all the answers

    Why has the topic of quantal and graded responses never been examined?

    <p>It is so fundamental that all trainees entering into a career of intensive care medicine are expected to have an intuitive understanding of it ab initio (B)</p> Signup and view all the answers

    Which author is mentioned to have a small section related to quantal and graded responses?

    <p>Katzung (A)</p> Signup and view all the answers

    In what style does Doug Waud present the topic of quantal and graded responses?

    <p>Relaxed conversational style, with just the tiniest element of curmudgeonly sarcasm (D)</p> Signup and view all the answers

    What type of curve can quantal dose-response data be represented as?

    <p>Bell curve (B)</p> Signup and view all the answers

    Why are logarithmic quantal dose-response curves commonly used?

    <p>To linearize the dose-response range of interest (B)</p> Signup and view all the answers

    What is the purpose of logarithmic transformation of the dose axis in quantal dose-response data?

    <p>To force the graph to resemble a normal distribution (A)</p> Signup and view all the answers

    What type of events are graded dose-response curves not well-suited to describe?

    <p>Either-or events (A)</p> Signup and view all the answers

    What are dose response and dose effect fundamental descriptors of?

    <p>Events occurring after an exposure (D)</p> Signup and view all the answers

    Where are nonmonotonic dose-response curves and low-dose effects considered principles?

    <p>Endocrinology (C)</p> Signup and view all the answers

    What are unanswered questions regarding nonmonotonic dose-response curves and low-dose effects particularly in?

    <p>Toxicology and risk assessment (B)</p> Signup and view all the answers

    What does dose–response assessment involve evaluating?

    <p>The dose required to produce a particular effect of interest (C)</p> Signup and view all the answers

    What are threshold data for a particular target organ often used as a substitute for?

    <p>Quantitative dose-response data (D)</p> Signup and view all the answers

    Where are ophthalmic threshold levels and toxicity estimates for human responses available as reference?

    <p>Table 11.2 (A)</p> Signup and view all the answers

    What are the two categories of dose-response models?

    <p>Empirical and biologically based models (B)</p> Signup and view all the answers

    What is the central role of the dose-response relationship in toxicology?

    <p>Guiding hazard assessment testing, modeling, and environmental regulations (A)</p> Signup and view all the answers

    What is the process involved in dose-response modeling (DRM)?

    <p>Data selection, model selection, statistical distribution assumption, and parameter determination (D)</p> Signup and view all the answers

    What is the purpose of using dose-response curves in modeling studies?

    <p>Estimate probabilities of intended and unintended effects for a risk assessment scenario (B)</p> Signup and view all the answers

    What is the aim of toxicological mechanism research regarding dose-response relationship?

    <p>Clarify the underlying basis for dose-dependent transitions (C)</p> Signup and view all the answers

    What is assumed for the response in dose-response modeling?

    <p>Statistical distribution (C)</p> Signup and view all the answers

    What is the implementation of dose-response analysis involved in?

    <p>Extrapolating results to other exposure scenarios and doses (A)</p> Signup and view all the answers

    What is the impact of dose-response models in public health agencies?

    <p>Used for risk assessment and decisions on banning or limiting exposure to hazardous agents (C)</p> Signup and view all the answers

    What types of data require different methods for modeling changes in response beyond the control response?

    <p>Quantal response, count data, continuous response, categorical measure (C)</p> Signup and view all the answers

    What is the major purpose of dose-response modeling in toxicology?

    <p>Estimating probabilities of intended and unintended effects for a risk assessment scenario (B)</p> Signup and view all the answers

    What is the role of statistical distribution in dose-response modeling?

    <p>Used to derive a mathematical function describing the fit of the model to the data (D)</p> Signup and view all the answers

    What is the significance of dose-response models in toxicological research?

    <p>Fundamental to toxicological research and applications (A)</p> Signup and view all the answers

    What is the final step in Dose–Response Modeling (DRM) aimed at?

    <p>Understanding sensitivity and judging the overall quality of predictions (A)</p> Signup and view all the answers

    What does the Dose–Response Modeling (DRM) involve?

    <p>Five basic steps that can be repeated with different parameterization (C)</p> Signup and view all the answers

    What is sensitivity analysis focused on in Dose–Response Modeling (DRM)?

    <p>Assumptions used in the DRA or implementation (D)</p> Signup and view all the answers

    What is DRM regarded as for analyzing dose–response data in animal and human studies?

    <p>An adequate approach (C)</p> Signup and view all the answers

    What is the benchmark dose (BMD) derived from DRM used for?

    <p>Quantifying uncertainties and may be used for exposures exceeding guidance and guideline values (C)</p> Signup and view all the answers

    What do dose response and dose effect describe in toxicology?

    <p>Fundamental descriptors of events following exposure (B)</p> Signup and view all the answers

    What can dose–response models range from?

    <p>Simple to complex multicompartment toxicokinetic/toxicodynamic models (C)</p> Signup and view all the answers

    How may model uncertainties in dose–response analysis be represented?

    <p>By probability trees and rely on expert opinion or algorithms for evaluation (C)</p> Signup and view all the answers

    What should dose-response analysis focus on?

    <p>The critical effect in the most sensitive subsection of the population (C)</p> Signup and view all the answers

    What do newer areas of study, such as genomics, proteomics, and metabolomics, aim to apply technologies to evaluate or monitor?

    <p>Patient health based on dose-response behavior (B)</p> Signup and view all the answers

    What is the impact of dose–response models in public health agencies?

    <p>They provide valuable insights for setting exposure guidelines and standards (B)</p> Signup and view all the answers

    What are dose response and dose effect fundamental descriptors of?

    <p>Events following exposure in toxicology (B)</p> Signup and view all the answers

    Study Notes

    The Development and Impact of Extreme Ultraviolet Lithography (EUVL)

    • UV light with varying wavelengths, including 365nm, 248nm, 193nm, and eventually 13.8nm, was used in lithography technology development.
    • Initial skepticism surrounded the feasibility of Extreme Ultraviolet (EUV) lithography due to the technology's absorption by glass and air, necessitating the use of mirrors in a vacuum.
    • US Department of Energy-funded research at Livermore, Berkeley, and Sandia National Laboratories addressed technical obstacles and led to the invention of EUV technology.
    • The Cooperative R&D Agreement (CRADA) between private companies and the Labs resulted in the formation of EUV-LLC, which held the rights to the technology.
    • Licensing of the EUV technology was denied to Japanese companies, leading to ASML becoming the sole benefactor of the critical technology.
    • ASML successfully deployed EUV-LLC's intellectual property, leading to the production of lithography machines capable of producing up to 200 wafers per hour by 2022.
    • ASML's use of Zeiss optics, known for their precision, solidified the company's position as the world leader in lithography technology.
    • ASML's record turnover of 18.6 billion € in 2021 surpassed competitors Canon and Nikon, who were denied access to the EUV technology.
    • The US pressured Dutch authorities not to sell the EUV machines to China, and ASML is currently prohibited from shipping the machines to China under Dutch export controls.
    • EUV photomasks work by reflecting light through alternating layers of molybdenum and silicon, and are mainly produced by AGC Inc. and Hoya Corporation.
    • EUV lithography requires a vacuum due to the absorption of EUV radiation by all matter, and all optical elements must use defect-free molybdenum/silicon multilayers.
    • An EUV tool comprises a laser-driven tin plasma light source, reflective optics with multilayer mirrors, and a hydrogen gas ambient to keep the EUV collector mirror free of tin deposition.

    Dose-Response Relationship in Toxicology

    • Dose-response evaluation involves plotting the percent of individuals responding as a function of dose for toxicological signs or symptoms and target organs.
    • Dose-response curves are used in modeling studies to estimate probabilities of intended and unintended effects for a risk assessment scenario.
    • The dose-response relationship is central in toxicology, guiding hazard assessment testing, modeling, and environmental regulations.
    • Toxicological mechanism research aims to clarify the underlying basis for dose-dependent transitions.
    • The dose-response relationship is fundamental to toxicological research and applications.
    • Dose-response modeling (DRM) involves six basic steps, including data selection, model selection, statistical distribution assumption, and parameter determination.
    • Empirical and biologically based models are two categories of dose-response models, with most focusing on empirical models.
    • Statistical distribution is assumed for the response and used to derive a mathematical function describing the fit of the model to the data.
    • The implementation of dose-response analysis involves extrapolating results to other exposure scenarios and doses, including from animals to humans.
    • Dose-response models can be simple (e.g., linear) or complicated (e.g., biologically based), often needing different models to describe different parts of the relationship.
    • Different types of data (quantal response, count data, continuous response, categorical measure) require different methods for modeling changes in response beyond the control response.
    • Dose-response models are used by public health agencies for risk assessment and decisions on banning or limiting exposure to hazardous agents, with a major impact in limiting exposure.

    Dose–Response Modeling and Analysis in Toxicology

    • Dose–Response Modeling (DRM) can be used to identify a low-risk level of exposure by extrapolating known responses.
    • DRM involves five basic steps that can be repeated with different parameterization to understand the impact on predictions.
    • The final step in DRM (step 6) is aimed at understanding sensitivity and judging the overall quality of predictions.
    • Sensitivity analysis can focus on assumptions used in the DRA or implementation and is performed either before or after step 5.
    • DRM is regarded as an adequate approach for analyzing dose–response data in animal and human studies.
    • DRM is used for calculating a benchmark dose (BMD) based on the entire dose–response curve, offering advantages over NOAELs and LOAELs.
    • The BMD derived from DRM allows for quantifying uncertainties and may be used for exposures exceeding guidance and guideline values.
    • Dose response and dose effect are fundamental descriptors of events following exposure in toxicology.
    • Newer areas of study, such as genomics, proteomics, and metabolomics, aim to apply technologies to evaluate or monitor patient health based on dose-response behavior.
    • Dose–response models describe a cause–effect relationship and can range from simple to complex multicompartment toxicokinetic/toxicodynamic models.
    • Model uncertainties in dose–response analysis may be represented by probability trees and rely on expert opinion or algorithms for evaluation.
    • Dose-response analysis should focus on the critical effect in the most sensitive subsection of the population.

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    Description

    Explore the history and impact of Extreme Ultraviolet Lithography (EUVL) with this quiz. Learn about the development of EUV technology, the key players involved, and the impact of EUV lithography on the semiconductor industry. Test your knowledge of EUV photomasks, lithography machines, and the global competition surrounding EUV technology.

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