Copper Electroplating in IC Fabrication

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What is a key advantage of copper over aluminum in integrated circuits?

It is more resistant to corrosion
It has a higher melting point
It allows for smaller circuit features and faster chip performance (correct)
It is less expensive to produce

What is a benefit of the SABRE Electrodeposition process compared to vacuum deposition methods?

It is an inexpensive process (correct)
It is faster
It is more expensive
It is more complex

What is a key feature of the SABRE Electrodeposition process?

It allows for full filling of integrated circuit features with copper deposits (correct)
It uses inorganic additives
It allows for partial filling of integrated circuit features
It is limited to simple circuit designs

What is a concern related to the use of copper in integrated circuits?

Copper contamination (A) Signup and view all the answers

What market share does SABRE have in the electroplating market?

~75% (B) Signup and view all the answers

How many SABRE systems have been installed worldwide?

Around 500 (B) Signup and view all the answers

What happens to the resistance across the wafer as plating continues?

It drops (D) Signup and view all the answers

Why is it important to compensate for the initial terminal effect during plating?

To prevent feature fill and uniformity from being affected (D) Signup and view all the answers

What is the purpose of the high resistance element, HRVA, in the plating process?

To achieve uniform plating for thin Cu seeds (C) Signup and view all the answers

What is the outcome of using galvanostatic (current controlled) wafer immersion in the SABRE design?

A large spike in current density (C) Signup and view all the answers

What is the benefit of using potentiostatic (voltage controlled) wafer immersion in the new design?

It reduces the current density spike (D) Signup and view all the answers

What is the result of using potentiostatic entry in the new design?

No change in fill rates and film properties (B) Signup and view all the answers

What is the primary function of the SAC Contactors 2 Filter Flow Meter Contactors?

To introduce O2 into the SAC to corrode copper particles (C) Signup and view all the answers

What is the purpose of the 20nm filter in the SAC Effluent Filtration system?

To purify the SAC effluent of contamination before returning to the bath (D) Signup and view all the answers

What is the benefit of the SAC HD TF20 upgrade in terms of SAC chamber pressure?

It eliminates the possibility of over pressurizing or under pressurizing the SAC chamber (D) Signup and view all the answers

What is the purpose of the built-in sensors in the SAC Effluent Filtration system?

To provide feedback for system lifetime and performance (B) Signup and view all the answers

What is the relationship between the SAC HD TF20 upgrade and the Full SAC HD upgrade?

The SAC HD TF20 upgrade can be either a stand-alone upgrade or part of the Full SAC HD upgrade (C) Signup and view all the answers

What is the primary benefit of the Open SAC upgrade?

It eliminates the possibility of over pressurizing or under pressurizing the SAC chamber (C) Signup and view all the answers

What is the main purpose of the Contact Shim and Vortex Robot with AWC?

To reduce contact resistance and variation (A) Signup and view all the answers

What happens when the E-field is concentrated at the edges of the electrodes?

Thick edge film deposition occurs (C) Signup and view all the answers

What is the role of additives in the copper fill process?

To slow down the deposition process at corners (D) Signup and view all the answers

What is the purpose of SmartDose+ Chemistry Control Tool?

To control the additive concentration (A) Signup and view all the answers

What happens without predictive dosing in the SmartDose+ system?

Large fluctuations in additive concentration occur (C) Signup and view all the answers

What is the result of using additives in the copper fill process?

Superconformal fill results (B) Signup and view all the answers

What is the primary purpose of the Edge Bevel Removal (EBR) process?

To remove copper from the wafer bevel and undercutting (C) Signup and view all the answers

What is the edge exclusion distance in the Electrofill process with clamshell edge exclusion?

2 mm (B) Signup and view all the answers

What is the concentration of H2O2 in the standard EBR process?

7% (B) Signup and view all the answers

What is the benefit of the nozzle in the EBR process?

It has built-in bevel etch and on-board mixing and dilution (A) Signup and view all the answers

What is the goal of the Extreme EBR process?

To reduce PEM wafer processing time to less than 100 seconds (B) Signup and view all the answers

What is the result of the EBR process on the wafer bevel?

The wafer bevel is copper-free (A) Signup and view all the answers