18 Questions
Which etching method involves using neutrally-charged, high-energy ions for etching?
Dry etching
What is a disadvantage of wet etching?
Some gasses used are corrosive
What is an advantage of dry etching over wet etching?
Operators can automate the process
Which factor affects the etch rate in dry etching processes?
The system design
What is the state of matter that plasma consists of?
Free electrons, ions, and neutrons or molecules in ionized gas form
What is plasma radiation damage associated with?
Effects caused by exposure to plasma's high-energy particles or radiation
What is a key advantage of dry etching over wet etching?
Easier disposal of chemicals
Why is dry etching considered more precise than wet etching?
It causes less undercutting
What is a notable disadvantage of wet etching compared to dry etching?
Operator hazards
Which type of etching is known for directional etching without using the crystal orientation of Si?
Dry etching
Why does dry etching have better process control compared to wet etching?
Ease of automation
What is a significant advantage of dry etching in terms of safety?
Can easily automate the process
What is the purpose of spraying DI water onto the surface of the etched film after using etchants?
To remove the etchants
Which of the following is NOT an advantage of spray etching over immersion technique?
Higher accuracy in removing layers
Why is it important to use etch-resistant materials in a silicon wet etching system?
To prevent deterioration of the machine
What is the main disadvantage associated with silicon wet etching system cost?
High initial investment
Which isotropic etchant is commonly used for Silicon in wet etching?
$HNO_3$ and $HF$
What advantage does spray etching offer in terms of chemical usage compared to immersion techniques?
Increased chemical efficiency
Test your knowledge on the advantages and disadvantages of dry etching, a process that eliminates handling of dangerous acids and solvents, uses small amounts of chemicals, and provides high resolution and cleanliness. Explore concepts like isotropic and anisotropic etch profiles, directional etching, and more.
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